发明名称 Method of operating a vacuum system with varying pressure
摘要 <p>Process for operating vacuum installations comprises introducing a gas into casings before flooding the vacuum chamber (V) so that dust and particles are blown out, and preventing penetration of the dust and particles into the casings. Preferred Features: The casings consist of hollow rolls or roll sections (12) containing roller bearings and inner rings. The gas is blown through the annular gaps between the inner rings and outer rings. The gas amount is regulated.</p>
申请公布号 EP1580446(A1) 申请公布日期 2005.09.28
申请号 EP20040007325 申请日期 2004.03.26
申请人 APPLIED FILMS GMBH & CO. KG 发明人 HEIN, STEFAN;KLEMM, GUENTER
分类号 B65H5/02;B08B5/02;B08B5/04;B65H23/025;B65H27/00;C23C14/56;D06C3/06;D21G1/02;F16C13/00;H01L21/02;(IPC1-7):F16C13/00 主分类号 B65H5/02
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