发明名称 |
Method of operating a vacuum system with varying pressure |
摘要 |
<p>Process for operating vacuum installations comprises introducing a gas into casings before flooding the vacuum chamber (V) so that dust and particles are blown out, and preventing penetration of the dust and particles into the casings. Preferred Features: The casings consist of hollow rolls or roll sections (12) containing roller bearings and inner rings. The gas is blown through the annular gaps between the inner rings and outer rings. The gas amount is regulated.</p> |
申请公布号 |
EP1580446(A1) |
申请公布日期 |
2005.09.28 |
申请号 |
EP20040007325 |
申请日期 |
2004.03.26 |
申请人 |
APPLIED FILMS GMBH & CO. KG |
发明人 |
HEIN, STEFAN;KLEMM, GUENTER |
分类号 |
B65H5/02;B08B5/02;B08B5/04;B65H23/025;B65H27/00;C23C14/56;D06C3/06;D21G1/02;F16C13/00;H01L21/02;(IPC1-7):F16C13/00 |
主分类号 |
B65H5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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