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发明名称
DECOUPLING OF ACTUATORS FOR POSITIONING AN OBJECT
摘要
申请公布号
SG114766(A1)
申请公布日期
2005.09.28
申请号
SG20050001178
申请日期
2005.03.01
申请人
ASM ASSEMBLY AUTOMATION LTD
发明人
WIDDOWSON, GARY PETER;NG MAN CHUNG, RAYMOND;TANG YEN HSI, TERRY
分类号
B25B11/00;H01L21/68;H02K41/00
主分类号
B25B11/00
代理机构
代理人
主权项
地址
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