摘要 |
An electrostatic motor includes a stator electrode member (1a) and a slider electrode member (1b). The stator electrode member (1a) and the slider electrode member (1b) are provided with drive electrode patterns (2), and the drive electrode patterns are covered by cover films (4). Surfaces of the stator electrode member (1a) and the slider electrode member (1b) contacting each other are provided with a plurality of minute projections (5). A clearance between the stator electrode member and the slider electrode member is maintained by the contact of the projections. The projections (5) may also be provided on only one of the stator electrode member (1a) and the slider electrode member (1b), with the other electrode member having a flat surface.
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