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发明名称
AN INTEGRATED STRUCTURE AND METHOD FOR FABRICATING THE SAME
摘要
申请公布号
EP1578686(A2)
申请公布日期
2005.09.28
申请号
EP20030811019
申请日期
2003.11.07
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
POGGE, BERNHARD;DESPONT, MICHEL;DRECHSLER, UTE;PRASAD, CHANDRIKA;VETTIGER, PETER;YU, ROY
分类号
B81C3/00;H01L21/768;(IPC1-7):B81C3/00
主分类号
B81C3/00
代理机构
代理人
主权项
地址
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