| 摘要 |
PROBLEM TO BE SOLVED: To provide a dimension measuring device capable of enhancing measuring accuracy by preventing searching errors. SOLUTION: Image data in which, of plural pattern layers provided on a board 1, the pattern P1 of the upper layer and the pattern P2 of the lower layer are included is input, and either the pattern P1 or P2 is separated from the image data and registered as reference pattern image data; from image data obtained by photographing the top of the board 1 in sequence, a pattern that coincides with the reference pattern image data is subjected to image searching to measure the amount of deviation of the pattern P1 of the upper layer from the pattern P2 of the lower layer. |
