Monomer having electron-withdrawing group and process for preparing the same

摘要

A monomer containing an electron-withdrawing group of the present invention is represented by following Formula (a), (b) or (c): wherein A¹, A², and A³ are each a ring; R^a, R^b, R^c, and R^u are the same or different and are each a hydrogen atom or organic group; at least one of R^s, R^w and R^v, at least one of R^t and R^w1, and at least one of the two R^w2s are each an electron-withdrawing group, and the others are each a hydrogen atom or organic group; W¹ is a single bond or linkage group; and n denotes an integer of 2 to 25, where at least two of R^a, R^b, R^c, R^s, R^t, R^u, R^v, R^w, R^w1, R^w2, W¹, and carbon atoms constituting ring A¹, carbon atoms constituting ring A², and carbon atoms constituting ring A³ may be combined to form a ring, respectively. The electron-withdrawing groups in R^s, R^t, R^v, R^w, R^w1, and R^w2 are, for example, groups each containing a fluorine atom. The monomer is useful as a raw material for photoresist polymeric compounds.