发明名称 Transistor having high dielectric constant gate insulating layer and source and drain forming Schottky contact with substrate
摘要 The invention is directed to a device for regulating the flow of electric current with high dielectric constant gate insulating layer and a source and/or drain forming a Schottky contact or Schottky-like region with a substrate and its fabrication method. In one aspect, the gate insulating layer has a dielectric constant greater than the dielectric constant of silicon. In another aspect, the current regulating device may be a MOSFET device, optionally a planar P-type or N-type MOSFET, having any orientation. In another aspect, the source and/or drain may consist partially or fully of a silicide.
申请公布号 US6949787(B2) 申请公布日期 2005.09.27
申请号 US20020215447 申请日期 2002.08.09
申请人 发明人
分类号 H01L21/28;H01L21/336;H01L21/8234;H01L27/095;H01L29/10;H01L29/417;H01L29/47;H01L29/51;H01L29/78;(IPC1-7):H01L27/95 主分类号 H01L21/28
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