发明名称 Semiconductor device and its manufacturing method
摘要 A semiconductor device is capable of being applied with both a positive and a negative voltage to its control gate, and writing to its memory requires a low voltage. A control gate is formed on a memory unit region of a field oxide film, and an inter-layer silicon oxide film is formed on its surface. A gate oxide film for a non-volatile memory is formed on a P substrate between N type diffusion layers. The floating gate is formed on the inter-layer silicon oxide film, the field oxide film, and the gate oxide film for the non-volatile memory. Since a large coupling ratio between the control gate and the floating gate is available on the field oxide film, memory rewriting requires only a low voltage. Further, since the control gate is formed by a poly silicon film, both a positive voltage and a negative voltage can be applied to the control gate.
申请公布号 US6949790(B2) 申请公布日期 2005.09.27
申请号 US20030479629 申请日期 2003.12.04
申请人 RICOH COMPANY, LTD. 发明人 IWAI MORIYA;YOSHIDA MASAAKI;NAKANISHI HIROAKI
分类号 H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L29/788 主分类号 H01L21/8247
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