| 摘要 |
A method of generating a simulated voltage contrast image includes steps for receiving as input design information for an integrated circuit die, selecting a net of the integrated circuit from the design information, generating a trace outline of the selected net from the image, analyzing the design information to calculate an interaction between a charged particle beam and the selected net, selecting a shading representative of the calculated interaction, and filling the trace outline of the selected net with the shading to generate the simulated voltage contrast image.
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