发明名称 |
Frequency uniformity of film bulk acoustic resonators |
摘要 |
The frequency uniformity of a film bulk acoustic resonator may be improved by controlling the thickness across a wafer of one or more layers of the film bulk acoustic resonator. One or more layers of the film bulk acoustic resonator may be deposited in a way that irregularities in the deposition process from one die to another may be controlled.
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申请公布号 |
US6949268(B2) |
申请公布日期 |
2005.09.27 |
申请号 |
US20020185399 |
申请日期 |
2002.06.28 |
申请人 |
INTEL CORPORATION |
发明人 |
WANG LI-PENG;SHIM DONG S.;MA QING |
分类号 |
H03H3/02;H03H3/04;H03H9/17;(IPC1-7):B05D5/12 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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