发明名称 Continuous coating system
摘要 A continuous coating system has several treatment chambers ( 1, 2 ) that are arranged one after the other in such a way that in each case, a wall ( 3 ) of one treatment chamber ( 1 ) having a passage ( 5 ) contacts a wall ( 4 ) in the adjacent treatment chamber ( 2 ) that also has a passage ( 6 ). One of the passages ( 5 ) is provided in a sealing insert ( 7 ), which supports itself on the same side with a first support surface ( 9 ) on the wall ( 3 ) of one treatment chamber ( 1 ) and with a second support surface ( 10 ) against the wall ( 4 ) of the adjacent treatment chamber ( 2 ). Between the two support surfaces ( 9, 10 ) and the respective walls ( 3, 4 ), in each case there is a surrounding gasket ( 13, 14 ) against the respective support surface ( 9, 10 ) and the wall ( 3, 4 ).
申请公布号 US6949173(B2) 申请公布日期 2005.09.27
申请号 US20030445101 申请日期 2003.05.23
申请人 APPLIED FILMS GMBH & CO. KG 发明人 SAUER ANDREAS
分类号 C23C14/56;H01L21/00;(IPC1-7):C23C14/34;C23C16/00 主分类号 C23C14/56
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