| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser heat treatment method in which the overlapping part of laser light can be made unrecognisable to human eye by performing scanning with a laser beam having an elongated cross-section in the direction intersecting the longitudinal direction of the elongated cross-section thereby polycrystallizing an amorphous silicon film. SOLUTION: The laser heat treatment method comprises a first scanning step employing a laser light in the wavelength region of 390-640 nm having an elongated cross-section, and a second scanning step for scanning an amorphous silicon film contiguous to a first polysilicon film with laser light while overlapping the end of the first polysilicon film. Assuming the lower limit laser output ensuring a mobility of 80% or above for the laser output bringing about a maximum mobility is Elow, and the upper limit laser output is Ehigh, a laser output E satisfying a relation Elow≤E≤(Ehigh+Elow)/2 is employed in the first scan, in the relation of laser output and mobility obtained in a preliminary measuring step. COPYRIGHT: (C)2005,JPO&NCIPI
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