| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-lattice type optical displacement measuring device capable of improving an alignment characteristic. SOLUTION: This optical displacement measuring device 1 is a reflection type one capable of moving a sensor head 5 in the measurement axis X-direction on a scale 3. The device 1 is a three-lattice type one equipped with a first optical lattice 25 arranged on a light source part 13 side, a second optical lattice 9 arranged on the scale 3, and a third optical lattice 29 arranged on a light receiving part 33. A light diffusion part 19 is arranged between the light source part 13 and the first optical lattice 25. Parallel light L2 from the light source part 13 is diffused by the light diffusion part 19, and enters the first optical lattice 25. COPYRIGHT: (C)2005,JPO&NCIPI
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