| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting method for a brittle material which can obtain a prescribed mirror surface without polishing. SOLUTION: The brittle material of a single crystal is cut by an elliptic vibration cutting method cutting the material while elliptic vibration is applied to the blade edge of a tool. By this method, even when the brittle material is calcium fluoride, since it is processed while scraps are pulled up, the thickness of the scraps and cutting force are reduced sharply, and the material can be cut efficiently in a wide ductility mode region. More specifically, the processing by a ductility mode is possible even when the thickness of cutting exceeds 85 nm. COPYRIGHT: (C)2005,JPO&NCIPI
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