发明名称 SHEET-TYPE BETA-FESI2 ELEMENT, AND METHOD AND DEVICE FOR MANUFACTURING THE SAME
摘要 In the air or in an inert gas atmosphere, powder raw materials are deposited on a flexible sheet for forming a film, an electrode, and a protective film under pressing a heating roller, and a device can be manufactured by continuous operations in which all the steps are integrated. There is provided a cheap device, by which the manhours for manufacturing a device is reduced, the throughput is improved in comparison with those of a previous device by which a film, an electrode, and a protective film have been manufactured on a crystal substrate in a vacuum.
申请公布号 US2005205893(A1) 申请公布日期 2005.09.22
申请号 US20040803870D 申请日期 2004.03.18
申请人 MAKITA YUNOSUKE;NAKAYAMA YASUHIKO;LIU ZHENGXIN 发明人 MAKITA YUNOSUKE;NAKAYAMA YASUHIKO;LIU ZHENGXIN
分类号 H01L21/338;H01L31/0328;H01L31/0336;H01L31/072;H01L31/109;(IPC1-7):H01L21/338 主分类号 H01L21/338
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