发明名称 |
Manufacturing method of semiconductor device |
摘要 |
In a trial production process from a design process to an actual manufacturing process of semiconductor devices, a pre-process of a pad matrix wafer with simpler configuration than a prototype wafer is completed before a pre-process of the prototype wafer is completed, and data of conditions and evaluations to be used in a test process and a post-process subsequent to the pre-process of the prototype wafer is created by using the pad matrix wafer. Therefore, the data of conditions and evaluations used in the process subsequent to the pre-process can be prepared and the design modifications of various devices used in the process subsequent to the pre-process can be finished before the post-process of the prototype wafer is started. Therefore, a smooth transition from the pre-process to the subsequent processes of the prototype can be achieved, and the delivery time of semiconductor devices can be shortened.
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申请公布号 |
US2005208684(A1) |
申请公布日期 |
2005.09.22 |
申请号 |
US20050037168 |
申请日期 |
2005.01.19 |
申请人 |
TRECENTI TECHNOLOGIES, INC. |
发明人 |
YAMADA NAOKI;MAKIUCHI TAKESHI |
分类号 |
H01L21/28;G01R31/26;H01L21/00;H01L21/02;H01L21/3205;H01L21/66;H01L23/52;H01L23/544;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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