| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method by which a low thermal expansion ceramic containing β-eucryptite and silicon carbide and having low coefficient of thermal expansion of (-1×10<SP>-6</SP>)-(1×10<SP>-6</SP>) /°C (20-30°C) is densified even in normal pressure firing. <P>SOLUTION: The method of manufacturing the low thermal expansion ceramic includes: a pulverizing step for blending raw material powder comprising 73-82 mass% β-eucryptite, 12-26.9 mass% silicon carbide and 0.1-5.0 mass% aluminum nitride and pulverizing; a forming step for press-forming the powder obtained in the pulverizing step; and a firing step for firing the formed body obtained in the forming step under a normal pressure reducing atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
