| 摘要 |
PROBLEM TO BE SOLVED: To provide such a technology as an operator inputs and stores new information, found inherently and empirically about abnormalities occurring in a substrate processing equipment, directly in the equipment without causing any confusion with standard information. SOLUTION: In the substrate processing equipment, standard information concerning abnormality of th equipment is held in fixed information files A201, A202, ... from the time of shipment and its content is not rewritable. On the other hand, an operator can input new information found inherently and empirically depending on the use conditions of the substrate processing equipment 1 directly from an input means 7f. The new information thus inputted is held in rewritable information files B201, B202, ... independent from the fixed information files A201, A202, .... Consequently, confusion between the standard information concerning abnormality of the equipment and the information founded anew can be prevented. COPYRIGHT: (C)2005,JPO&NCIPI
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