| 摘要 |
PROBLEM TO BE SOLVED: To solve problems in the conventional manufacture of gaseous nitrogen that an apparatus is made large-scaled and the maintenance of instrument such as a solenoid valve is a week point in the PSA system, gaseous nitrogen produced in the membrane separation system has about 95-99.9% purity and does not meet the demand of high purity, and large scaled equipment is required though 99.999% high purity gaseous nitrogen is obtained in the cryogenic separation. SOLUTION: In a method for producing high purity gaseous nitrogen, the content of gaseous oxygen in the gaseous nitrogen is reduced to 0% or nearly 0% by adding gaseous hydrogen into the gaseous nitrogen produced in a gaseous nitrogen manufacturing apparatus 10 to prepare a gaseous mixture and heating the gaseous mixture to react the gaseous hydrogen with gaseous oxygen to produce water. COPYRIGHT: (C)2005,JPO&NCIPI
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