| 摘要 |
PROBLEM TO BE SOLVED: To provide an ozone generating tube which has a long electrode structure prepared by connecting a plurality of high-voltage electrodes to each other and has an electrode structure with the gap between opposing electrodes kept more uniform, and with which the generated ozone is not thermally decomposed, and an ozone generating apparatus. SOLUTION: The ozone generating tube has the electrode structure comprising a cylindrical grounding electrode and a counter electrode which is composed of the plurality of high-voltage electrodes concentrically disposed inside the grounding electrode forming a gap therebetween and having a feeder terminal for supplying high voltage in the entrance side of a source material gas and which has a dielectric layer formed on at least one surface. The ozone generating tube has a pass hole for a coolant on the end face of the high-voltage electrode and has a connecting tool composed of a flexible conductive metal pipe and a connecting terminal. The end faces of the high-voltage electrodes are connected with the connecting tool to allow the coolant to pass through. COPYRIGHT: (C)2005,JPO&NCIPI
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