| 摘要 |
PROBLEM TO BE SOLVED: To provide a board storage device for preventing the friction of boards to secure the cleanliness thereof by pulling out the boards in a floated condition. SOLUTION: The board storage device has supporting members 2 installed in a plurality of stages on a cassette 1 for storing the plurality of boards 3. It comprises a lifting device 4 for lifting the cassette 1 up and down, a carrying supporting member 5 inserted between the supporting members 2 with the lift of the cassette 1 for floating the boards 3 supported by the supporting members 2, a pull-out device 6 for holding the floated boards 3 and pulling them to the outside of the cassette 1, and a floating table 7 for floating and supporting the boards 3 pulled out by the pull-out device 6. The floating table 7 has a space portion for fitting a hand 8 of the transfer machine, where the hand 8 is arranged. COPYRIGHT: (C)2005,JPO&NCIPI
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