发明名称 Laser beam processing machine
摘要 A laser beam processing machine comprising a chuck table having a holding surface for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises an output detector, installed adjacent to the chuck table, for detecting the output of a laser beam applied from the laser beam application means.
申请公布号 US2005205540(A1) 申请公布日期 2005.09.22
申请号 US20050082734 申请日期 2005.03.18
申请人 DISCO CORPORATION 发明人 IIZUKA KENTARO
分类号 B23K26/00;B23K26/08;B23K26/42;B81C99/00;G01J1/42;H01L21/302;(IPC1-7):B23K26/00 主分类号 B23K26/00
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