| 摘要 |
An evaluation apparatus includes a light source which irradiates a substrate with light, an imaging spectrometer which spectroscopically measures light reflected by the substrate and senses an image, a first calculator which obtains amplitude information on the amplitude of the spectral reflectance of the substrate based on the image sensed by the imaging spectrometer, a memory which holds in advance relationship information (approximate expression) representing the relationship between the amplitude information of the spectral reflectance and an absorption coefficient, and a second calculator which obtains the absorption coefficient of the substrate based on the amplitude information obtained by the first calculator and the relationship information (approximate expression) held in the memory.
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