VACUUM VAPOR-DEPOSITION APPARATUS AND METHOD OF PRODUCING VAPOR-DEPOSITED FILM

摘要

A vacuum deposition apparatus and a vapor-deposited film manufacturing method for manufacturing vapor- deposited film by forming a vapor-deposited layer on the surface of material film. In the vacuum deposition apparatus, a synchronization means (18) sets the outer peripheral velocity v1 of a coating roll (14) and the outer peripheral velocity v2 of a feed-out side guide roll (15) to v1 = v2 so that the vapor-deposited layer on the surface of the vapor- deposited film is not rubbed against the feed-out side guide roll (15). Thus, the possibility of damage to the vapor-deposited layer can be eliminated to provide a sufficient performance to the vapor-posited layer.