THIN-FILM FORMING DEVICE, PHOTOELECTRIC CONVERTER AND THIN-FILM MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin-film forming device that can manufacture more high-quality thin film efficiently, a photoelectric converter that is manufactured by the thin-film forming device, and a thin-film manufacturing method by which more high-quality thin film can be efficiently manufactured.

SOLUTION: A plasma CVD device uses a ladder-like electrode 13 as an electrode to generate plasma for decomposing a deposition gas. The ladder-lie electrode 13 is arranged at a position where it is nearly parallel to a substrate K, not being in contact therewith, and a distance between the substrate K and itself is 10 mm or less, at least during deposition.

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