发明名称 |
Resist stripping method and resist stripping apparatus |
摘要 |
After the resist stripping liquid is supplied to the surface of the substrate which is being rotated at a first rotational speed, the rotational speed of the substrate is reduced from the first rotational speed to a second rotational speed with the supply of the resist stripping liquid to the surface of the substrate continued, thereby forming a liquid film by a mount of the resist stripping liquid on the surface of the substrate and then, maintaining a state where the liquid film is formed.
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申请公布号 |
US2005205115(A1) |
申请公布日期 |
2005.09.22 |
申请号 |
US20050080878 |
申请日期 |
2005.03.15 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
OKUYAMA ATSUSHI;ASADA KAZUMI;OKAMOTO YOSHIO;SUGAHARA YUJI |
分类号 |
G03F7/42;B08B3/08;B08B7/00;G03C5/00;H01L21/00;H01L21/027;H01L21/304;(IPC1-7):G03C5/00 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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