发明名称 |
High-Q micromechanical resonator devices and filters utilizing same |
摘要 |
High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical "hollow-disk" ring resonators obtained by removing quadrants of material from solid disk resonators, but purposely leaving intact beams or spokes of material with quarter-wavelength dimensions to non-intrusively support the resonators. The use of notched support attachments closer to actual extensional ring nodal points further raises the Q. Vibrating micromechanical hollow-disk ring filters including mechanically coupled resonators with resonator Q's greater than 10,000 achieve filter Q's on the order of thousands via a low-velocity coupling scheme. A longitudinally mechanical spring is utilized to attach the notched-type, low-velocity coupling locations of the resonators in order to achieve a extremely narrow passband.
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申请公布号 |
US2005206479(A1) |
申请公布日期 |
2005.09.22 |
申请号 |
US20050040766 |
申请日期 |
2005.01.21 |
申请人 |
NGUYEN CLARK T;LI SHENG-SHIAN |
发明人 |
NGUYEN CLARK T.;LI SHENG-SHIAN |
分类号 |
H03H3/007;H03H9/02;H03H9/24;H03H9/46;H03H9/50;H03H9/54;(IPC1-7):H03H9/54 |
主分类号 |
H03H3/007 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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