| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aqueous resist composition which suppresses repelling and faulty wetting at ends of a coated substrate and can form a film having proper properties. <P>SOLUTION: The aqueous resist composition comprises (A) a resin which is soluble in water or an alkaline aqueous solution, (B) an alkylhydroxyethyl cellulose, 1 mass% aqueous solution, of which has a viscosity at 20°C of ≥1,000 mPa s, (C) water and (D) a hydroxyl-containing organic solvent, wherein the content of the alkylhydroxyethyl cellulose (B) is 0.001-1.0 mass%. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
