| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve problems in the related art that efficiency in management of apparatus is rather bad because the transfer work of wafers under the management to a cassette, judgment for state of apparatus from the result of measurement after the process, a sort classification work of the wafers used, and judgment for recycle are conducted by persons, and that delivery date is delayed because progress of production lot due to delay of the maintenance work is suspended, thereby becoming impossible to reach the scheduled number of wafers. <P>SOLUTION: The wafer management method is attained by utilizing a means for progressing and supplementing wafers under management without judgment, by a person by automatically conducting, in the management of a sheet controllable manufacturing apparatus, extraction of necessary wafers from the information stored for wafers under the management, transfer of wafers to a cassette, storage of process information, output from warehouse, processes sequence, classification of wafers used, and judgment for state of apparatus by storing the processing information and measuring information for each wafer under the management. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
