| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode structure and an optical device, in which the movable range of a movable electrode is made large even when the size of the structure is limited. SOLUTION: The electrode structure 2 has a substrate 3, and a fixed electrode 4 and a movable electrode 5 are provided on the substrate 3. The fixed electrode 4 has an electrode base part 6 fixed on the upper face of the substrate 3 and an auxiliary electrode part 7 which is fixed on the upper face 6a of the electrode base part 6 with respect to the substrate 3 and is so formed in a comb-shape to extend to the movable electrode 5 side. The movable electrode 5 has an electrode base part 8 fixed on the upper face of the substrate 3 so as to face to the electrode base part 6 of the fixed electrode 4 and an auxiliary electrode part 9 which is fixed on the upper face 8a of an electrode base part 8 with respect to the substrate 3 and is so formed in a comb-shape to extend to the fixed electrode 4 side. Each tooth forming the auxiliary electrode part 9 is so arranged that the position of the tooth is different from each other with respect to the auxiliary electrode part 7 of the fixed electrode 4. COPYRIGHT: (C)2005,JPO&NCIPI |
