| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier cleaning brush which is applied to clean the inner surface of a carrier for a 300 mm wafer to avoid predetermined brushing capability and moreover, to avert protrusion of bristle bundle bundles from grooves and service life reduction thereby. SOLUTION: Long groove bristle bundles 25a-25d for brushing the grooves and short mountain bristle bundles 26g, 26h for brushing the crests are planted on the outer peripheral surface of a drum-shaped rotator 21, at predetermined intervals in the directions of the rotation axis and the rotation. In the long-groove bristle bundles 25a-25d, the bristle bundles 25a, 25d are in charge of odd-numbered grooves, and the bristle bundles 25b, 25c are in charge of even-numbered grooves. The bristle bundles 25a, 25d have a tip diameter smaller than a maximum diameter for insertion into grooves and are disposed, while being displaced in the direction of rotating axis of a support, so that one is in charge of one side of grooves and the other is in charge of another side, while overlapping with each other in the direction of groove width. The bristle bundles 25b, 25c also have a tip diameter smaller than a maximum diameter for insertion into grooves and disposed, while being displaced in the direction of rotating axis of a support, so that one is in charge of one side of grooves and the other is in charge of another side, while overlapping with each other in the direction of groove width. COPYRIGHT: (C)2005,JPO&NCIPI
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