| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrying device and its carrying method which can restrain contact between a wafer and a wafer receiver and prevent the occurrence of flaws, cracks or the like in the wafer. SOLUTION: When an arm 4 with a wafer thereon moves up and the wafer passes through the detection position, a sensor 7 outputs a signal showing the passage of the wafer to a sensor signal processor 10. The sensor signal processor 10 outputs a signal for stopping the upward movement of the arm to an arm driver 11 based on the signal. The arm driver 11 stops the upward movement of the arm 4 based on the signal. Consequently, it is possible to prevent the wafer (a) from coming into contact with the wafer receiver when the wafer (a) is unloaded from a wafer cassette 1 by the arm 4. COPYRIGHT: (C)2005,JPO&NCIPI
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