METHOD OF CALIBRATING ELECTRON BEAM DETECTOR, ELECTRON BEAM EXPOSURE APPARATUS, AND ELECTRON BEAM EXPOSURE SYSTEM

摘要

PROBLEM TO BE SOLVED: To prevent the unevenness among patterns exposed by each electron beam exposure apparatus when conducting exposure using a plurality of electron beam exposure apparatuses. SOLUTION: A carry-in/out mechanism 5 for carrying in and out an electron beam detector 55 to be used as a reference is installed in an electron beam exposure apparatus 1. Using the electron beam detector 55 to be used as a reference, electron beam detectors 57 installed in respective electron beam exposure apparatuses 1 are calibrated. COPYRIGHT: (C)2005,JPO&NCIPI