| 摘要 |
PROBLEM TO BE SOLVED: To prevent the center of a boat from shifting from a reactor core in a substrate treatment device including a boat elevator. SOLUTION: The substrate treatment device includes a treatment chamber 6 for storing a substrate carried on the boat 4, an auxiliary chamber 9 connected under the treatment chamber, a throat lid 22 for supporting the boat and closing the treatment chamber, an arm 21 for supporting the throat lid, the boat elevator 10 for raising/lowering the arm via a lifting shaft, and a preventive mechanism 25 against a position shift for preventing the arm from displacing in an auxiliary chamber. COPYRIGHT: (C)2005,JPO&NCIPI
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