METHOD FOR FORMING TRANSPARENT CONDUCTIVE FILM, TRANSPARENT CONDUCTIVE FILM FORMED THEREBY, AND ARTICLE HAVING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a transparent conductive film which is highly safe, excellent in productivity and optical and electrical properties, and has an excellent limit curvature radius, and also to provide a transparent conductive film formed by the method, and an article having the transparent conductive film. SOLUTION: The method for forming the transparent conductive film on a substrate includes steps of: introducing a reactive gas in a discharge space under the atmospheric pressure or near that; rendering it in a plasma state; and exposing the substrate to the reactive gas in the plasma state. The reactive gas contains a reducing gas. COPYRIGHT: (C)2005,JPO&NCIPI