| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method of manufacturing a carbon nano-structure by which a vertically oriented and long carbon nanotube or a carbon nanofiber is formed on a substrate. SOLUTION: The apparatus for manufacturing the carbon nano-structure is provided with a tube body 10 having a vacuum chamber 11 evacuated by an evacuating means 12 inside, a gas introducing means 13 provided in the tube body and for supplying a carbon-based gas into the vacuum chamber 11, an electric furnace 14 for heating the inside of the vacuum chamber 11 provided in the tube body 10, and parallel flat electrodes 15 and 16 provided in the vacuum chamber 11 and for plasma-discharging. The carbon nano-structure is formed on the substrate by arranging the substrate for forming the carbon nano-structure on one of the parallel flat electrodes 15 and 16 and applying pulse voltage between the electrodes 15 and 16. COPYRIGHT: (C)2005,JPO&NCIPI
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