PROCESS FOR PRODUCING STAMPER FOR DIRECT MASTERING, AND STAMPER PRODUCED BY SUCH PROCESS AND OPTICAL DISC

摘要

When a stamper for optical disc molding is produced, a master plate obtained by a step for forming a heat sensitive material layer acting negatively with laser light on a substrate, a step for partially exposing the heat sensitive material layer by irradiating a specified region of the heat sensitive material layer with a laser beam, and a step for forming a fine pattern of protrusions and recesses by wet etching the partially exposed heat sensitive material layer is employed as a stamper for an injection molding machine. Consequently, a micro pit smaller than the optical limit spot of the laser beam is formed and there can be obtained a stamper in which defects are reduced.