| 摘要 |
The present invention discloses a reformed wafer boat. The reformed wafer boat has a plurality of trenches. A first interval is formed between each trench and one adjacent trench, and a second interval is formed between each trench and the other adjacent trench. The wafers placed on the trenches at both ends of the second interval are in form of back to back, and the first interval is formed between surfaces of each wafers. This kind of design does not affect uniformity during process, and the throughput can also be effectively improved.
|
