ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS
摘要
Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
申请公布号
WO2005087391(A2)
申请公布日期
2005.09.22
申请号
WO2005US08259
申请日期
2005.03.11
申请人
GEORGIA TECH RESEARCH CORPORATION;DEGERTEKIN, F., LEVENT;MCLEAN, JEFFREY, JOHN;KNIGHT, JOSHUA, GLENN