Micro-mechanical component for pressure sensor, has sacrificial layer in which cavern is formed, and comprising entry channel with openings in related top and bottom layers, where openings do not overlap, such that channel is misaligned

摘要

The component has a sacrificial layer (1) in which a cavern (10) is formed under a membrane (9). The cavern has an entry channel (8) between a top layer (6) and bottom layer (2) in the region of the membrane. The channel has openings (7, 3) in the respective top and bottom layers, where the openings are arranged opposite to one another. The openings do not overlap, such that the entry channel is misaligned. Independent claims are also included for the following: (A) an use of micro-mechanical component in a pressure sensor, fluid flow sensor, thermal acceleration sensor, thermal rotational rate sensor, thermal inclination angle sensor, adiabatic gas heat dissipation sensor, gas sensor, infrared sensor, thermal chemical sensor, thermal heater appliance, high dynamic temperature sensor, relative humidity sensor, infrared detector, infrared camera, thermopile, micro fluid channel and HF application (B) a method of manufacturing a micro-mechanical component.