Mobile, manual, electrostatic holder for semiconductor wafers, thin conductive, disc-shaped substrates etc. in semiconductor industry, with holder integrated in support of wafer, or substrate holder

摘要

Mobile tool has transportable, electrostatic substrate (18) holder (17) integrated in support (2) of substrate holder. Tool contains facility for permanent supply of electricity in principle but not permanently necessary. Typically it can be used for holding, clamping and release of semiconductor, conductive, insulating substrates 5 to 1500 microns thick. Handle (1) may be connected permanently, or temporarily, to substrate holder and may contain integrated voltage supply.