| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon ingot supporting pallet on which a short-cut cylindrical silicon ingot block-cut to a short size is placed by an automatic operation, and is prevented from falling in a direction of cut end faces of the cylindrical silicon ingot upon being placed so as to prevent the formation of a crack or chip on the ingot resulting from contact between a fixed guide and the outer edge of the end face of the ingot upon removing the ingot. SOLUTION: The supporting pallet comprises a pair of brackets 4, 4 which are disposed on a base board 7 so as to be movable in the longitudinal direction of the silicon ingot 6 placed on a plurality of bearing stands 8 placed on the base board 7, guides 3, 3 supported by respective brackets 4, 4, a plurality of guide rollers 1 which are supported by the respective guides 3, 3 and come in contact with both cut end faces 61 of the cylindrical ingot 6 to hold the ingot 6, and springs 2 interposed between the respective guide rollers 1 and the guides 3. The guide rollers 1 are made of a nonmetallic elastic material having a high hardness. COPYRIGHT: (C)2005,JPO&NCIPI
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