| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam optical system which allows a beam intensity distribution to be easily controlled to a desired profile without replacing a beam shaping lens, and a laser machining apparatus using the same. <P>SOLUTION: A laser beam optical system LA comprises a transfer lens system 3, an aspherical lens 4 functioning as a first beam intensity distribution conversion element, an aspherical lens 5 functioning as a second beam intensity distribution conversion element, a lens 6, a power variable transfer optical system 7, a mask 8, a processing lens 9, etc. and has the position of the aspherical lens 5 continuously changed along an optical axis to control a beam intensity distribution on a workpiece W to a desired profile. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
