METHOD INTEGRATING COLLOIDALLY PRODUCED NANOPARTICLES ON EPITAXIAL LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method integrating nonoparticles manufactured in a colloidal shape on an epitaxial layer. SOLUTION: The method performs the process where nanoparticles (6) is introduced into carrier solution (5), the carrier solution (5) is applied on the surface (4) of first epitaxial layer (3), the carrier solution (5) is evaporated on the surface (4), and the nanoparticles (6) are separated each other and integrated on the surface of the first epitaxial layer (3), and the process where a second epitaxial layer (8) is overgrown on the nanoarticles (6). Various parameters can be changed related to the distribution of nanoparticles in the structure of the epitaxial layer, especially the size and the surface density of individual nanoparticle can be changed by this method. COPYRIGHT: (C)2005,JPO&NCIPI