DISTRIBUTOR AND DISTRIBUTING METHOD, PLASMA PROCESSING SYSTEM AND METHOD, AND PROCESS FOR FABRICATING LCD

摘要

A distributor (30) comprising a square waveguide (31) being connected with a microwave oscillator (20), and a square waveguide (41) having a plurality of openings (43) made in a narrow wall (41B). The square waveguide (31) is hollow and a wave delaying member (53) having a dielectric constant ϵr is disposed in the square waveguide (41). Narrow walls (31A, 41A) of these two square waveguides (31, 41) are touched and a hole (32) for interconnecting both waveguides (31, 41) is made through the narrow walls (31A, 41A). Since the width of the waveguides (31, 41) does not become narrow at the joint thereof even if the interconnecting hole (32) is made narrow, frequency band capable of passing trough the joint is prevented from becoming narrower. Consequently, reflection loss is reduced when the frequency of an electromagnetic wave entering the distributor (30) is varied.