| 摘要 |
<P>PROBLEM TO BE SOLVED: To automatically extract information related to distribution pattern of defects as a quantitative index from defect data, collected by an automated defect inspecting apparatus. <P>SOLUTION: The distance between the position coordinates of the defect data collected by the automated defect inspecting apparatus, and the center of mass of a defect group is calculated; the defects are grouped automatically; the defect group is expressed by a two-dimensional normal distribution function. Features related to the defect distribution, such as the center of mass and the spatial size of the defect group, the number density of the defects, are optimally calculated and processed, based on the evaluation index. The features can be extracted repeatedly, objectively and quantitatively, in comparison with analysis process by humans. An analysis, using the large quantity of defect distribution data, such as the analysis of correlation between generation positions of the defects and operation conditions, can be quickly implemented. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
