| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveyance device whose operability and productivity can be improved, and to provide a substrate conveyance system equipped with the device. SOLUTION: The substrate conveyance device 1 is provided with a sealed container 3 having a cassette 2 which can store a plurality of substrates in a height direction, and a bulb 6 which is formed in the sealed container 3 and opens and closes an opening 5 transferring the substrates between the cassette 2 and a substrate treatment device 15. The substrate treatment device 15 is provided with a bulb opening and closing mechanism 19 including a driving source 21 opening and closing the bulb 6 and a cassette lifting mechanism 20 including a driving source 22 making the cassette 2 go up and down. The substrate conveyance device 1 is connected to the substrate treatment device 15. Thus, the bulb 6 and the cassette 2 are driven by the bulb opening and closing mechanism 19 and the cassette lifting mechanism 20. COPYRIGHT: (C)2005,JPO&NCIPI |
