INK-JET HEAD SUBSTRATE, METHOD OF MANUFACTURING INK-JET HEAD SUBSTRATE, AND INK-JET HEAD

摘要

PROBLEM TO BE SOLVED: To provide an ink-jet head substrate which is equipped with an exothermic resistor having a high specific resistance value, improved reliability, and extended life, and to provide an ink-jet head equipped with the ink-jet head substrate and a method of manufacturing the ink-jet head substrate. SOLUTION: The ink-jet head substrate comprises a bearing structure 100, and at least one exothermic resistor 104a which is arranged on the bearing substrate 100 and formed of a metallic carbonitride for generating thermal energy for ejecting ink. The metallic carbonitride has a structure represented by the following chemical formula: MxCyNz. COPYRIGHT: (C)2005,JPO&NCIPI