| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a leak of a liquid without causing a reduction of a measuring accuracy. <P>SOLUTION: There are provided a holder PH for holding a substrate P on a retaining face 34A, and a drive mechanism 70 for driving the substrate P in a direction substantially perpendicular to the retaining face 34A through an opening 71 formed on the retaining face 34A. There are further provided a moving part 76 movable in the perpendicular direction accompanied by driving the drive mechanism 70, and a surrounding member 76 surrounding the opening 71 from the lower side of the retaining face 34A. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
