发明名称 MAGNETIC ABRASIVE GRAIN AND MAGNETIC ABRASIVE FLUID
摘要 <P>PROBLEM TO BE SOLVED: To provide a magnetic abrasive grain which enables more precision surface processing, and a magnetic abrasive fluid containing the abrasive grain. <P>SOLUTION: The magnetic abrasive grain 1 has a magnetic layer 3 containing abrasive grains 4 and formed on a resin particle 2. Preferably, in this magnetic abrasive grain 1, the average particle diameter of the resin particle is &le;100 &mu;m, the average particle diameter of the abrasive grains is &le;100 nm, and the magnetic layer 3 is an electroless composite plating layer containing diamond particles. The magnetic abrasive fluid comprises a magnetic abrasive grain obtained by forming a magnetic layer containing abrasive particles on a resin particle and a liquid medium which floats the magnetic abrasive grain. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005255881(A) 申请公布日期 2005.09.22
申请号 JP20040070614 申请日期 2004.03.12
申请人 UTSUNOMIYA UNIV 发明人 YOSHIHARA SACHIO;SAKAI YUMA
分类号 B24B31/112;B24B37/00;C09K3/14;H01L21/304 主分类号 B24B31/112
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